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| MOTOROLA SEMICONDUCTOR TECHNICAL DATA Freescale Semiconductor, Inc. Order this document by MPXA6115A High Temperature Accuracy Integrated Silicon Pressure Sensor for Measuring Absolute Pressure, On- Chip Signal Conditioned, Temperature Compensated and Calibrated Motorola's MPXA6115A/MPXH6115A series sensor integrates on--chip, bipolar op amp circuitry and thin film resistor networks to provide a high output signal and temperature compensation. The small form factor and high reliability of on--chip integration make the Motorola pressure sensor a logical and economical choice for the system designer. SUPER SMALL OUTLINE The MPXA6115A/MPXH6115A series piezoresistive PACKAGE transducer is a state--of--the--art, monolithic, signal conditioned, silicon pressure sensor. This sensor combines advanced micromachining techniques, thin film metallization, and bipolar semiconductor processing to provide an accurate, high level analog output signal that is proportional to applied pressure. MPXH6115A6U Figure 1 shows a block diagram of the internal CASE 1317 circuitry integrated on a pressure sensor chip. Features * Improved Accuracy at High Temperature * Available in Small and Super Small Outline Packages * 1.5% Maximum Error over 0 to 85C * Ideally suited for Microprocessor or Microcontroller--Based Systems * Temperature Compensated from --40 to +125C * Durable Thermoplastic (PPS) Surface Mount Package Application Examples * Aviation Altimeters * Industrial Controls * Engine Control/Manifold Absolute Pressure (MAP) * Weather Station and Weather Reporting Device Barometers VS MPXA6115A MPXH6115A SERIES INTEGRATED PRESSURE SENSOR 15 to 115 kPa (2.2 to 16.7 psi) 0.2 to 4.8 Volts Output Freescale Semiconductor, Inc... SMALL OUTLINE PACKAGE MPXA6115A6U CASE 482 MPXH6115AC6U CASE 1317A MPXA6115AC6U CASE 482A J PIN NUMBER 1 2 3 4 N/C VS Gnd Vout 5 6 7 8 N/C N/C N/C N/C MPXV5004G7U CASE 482B NOTE: Pins 1, 5, 6, 7, and 8 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is denoted by the chamfered corner of the package. MPXV5004GC7U CASE 482C SENSING ELEMENT THIN FILM TEMPERATURE COMPENSATION AND GAIN STAGE #1 GAIN STAGE #2 AND GROUND REFERENCE SHIFT CIRCUITRY PIN NUMBER Vout 1 2 3 4 N/C VS Gnd Vout 5 6 7 8 N/C N/C N/C N/C PINS 1, 5, 6, 7 AND 8 ARE NO CONNECTS GND Figure 1. Fully Integrated Pressure Sensor Schematic REV 2 NOTE: Pins 1, 5, 6, 7, and 8 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is denoted by the notch in the lead. Motorola Sensor Device Data Motorola, Inc. 2003 MPXA6115A MPXH6115A SERIES For More Information On This Product, 1 Go to: www.freescale.com Freescale Semiconductor, Inc. MAXIMUM RATINGS(1) Parametrics Maximum Pressure (P1 > P2) Storage Temperature Operating Temperature Output Source Current @ Full Scale Output(2) Offset(2) Symbol Pmax Tstg TA Io+ Io -Value 400 --40 to +125 --40 to +125 0.5 --0.5 Units kPa C C mAdc mAdc Output Sink Current @ Minimum Pressure NOTES: 1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. 2. Maximum Output Current is controlled by effective impedance from Vout to Gnd or Vout to VS in the application circuit. OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25C unless otherwise noted, P1 > P2.) Characteristic Pressure Range Supply Voltage(1) Supply Current Minimum Pressure @ VS = 5.0 Volts Offset(2) (0 to 85C) (0 to 85C) (0 to 85C) (0 to 85C) Symbol POP VS Io Voff VFSO VFSS -- V/P Time(6) Time(7) tR -- -- Min 15 4.75 -- 0.133 4.633 4.433 -- -- -- -- -- Typ -- 5.0 6.0 0.200 4.700 4.500 -- 45 1.0 20 0.25 Max 115 5.25 10 0.268 4.768 4.568 1.5 -- -- -- -- Unit kPa Vdc mAdc Vdc Vdc Vdc %VFSS mV/kPa ms ms %VFSS Freescale Semiconductor, Inc... Full Scale Output(3) @ VS = 5.0 Volts Full Scale Span(4) @ VS = 5.0 Volts Accuracy(5) Sensitivity Response Warm--Up Offset Stability(8) NOTES: 1. Device is ratiometric within this specified excitation range. 2. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 3. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 4. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 5. Accuracy is the deviation in actual output from nominal output over the entire pressure range and temperature range as a percent of span at 25C due to all sources of error including the following: * Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. * Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. * Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum or maximum rated pressure at 25C. * TcSpan: Output deviation over the temperature range of 0 to 85C, relative to 25C. * TcOffset: Output deviation with minimum pressure applied, over the temperature range of 0 to 85C, relative to 25C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Warm--up Time is defined as the time required for the product to meet the specified output voltage after the pressure has been stabilized. 8. Offset Stability is the product's output deviation when subjected to 1000 cycles of Pulsed Pressure, Temperature Cycling with Bias Test. MPXA6115A MPXH6115A SERIES For More Information On This Product, 2 Go to: www.freescale.com Motorola Sensor Device Data Freescale Semiconductor, Inc. FLUORO SILICONE GEL DIE COAT P1 WIRE BOND LEAD FRAME THERMOPLASTIC CASE 100 nF VS Pin 2 MPXA6115A MPXH6115A Vout Pin 4 GND Pin 3 ABSOLUTE ELEMENT SEALED VACUUM REFERENCE DIE BOND 47 pF 51 K DIE STAINLESS STEEL CAP +5.0 V to ADC Figure 2. Cross Sectional Diagram SSOP (not to scale) Figure 2 illustrates the absolute sensing chip in the basic Super Small Outline chip carrier (Case 1317). Figure 3. Typical Application Circuit (Output Source Current Operation) Figure 3 shows a typical application circuit (output source current operation). Freescale Semiconductor, Inc... 5.0 4.5 4.0 OUTPUT (Volts) 3.5 3.0 2.5 2.0 1.5 1.0 0.5 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 85 90 95 100 105 110 115 120 Pressure (ref: to sealed vacuum) in kPa 0 MIN TRANSFER FUNCTION: Vout = Vs* (.009*P--.095) Error VS = 5.0 Vdc TEMP = 0 to 85C MAX TYP Figure 4. Output versus Absolute Pressure Figure 4 shows the sensor output signal relative to pressure input. Typical minimum and maximum output curves are shown for operation over 0 to 85C temperature range. The output will saturate outside of the rated pressure range. A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. The MPXA6115A/MPXH6115A series pressure sensor operating characteristics, internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long--term reliability. Contact the factory for information regarding media compatibility in your application. Motorola Sensor Device Data MPXA6115A MPXH6115A SERIES For More Information On This Product, 3 Go to: www.freescale.com Freescale Semiconductor, Inc. Transfer Function (MPXA6115A/MPXH6115A) Nominal Transfer Value: Vout = VS x (0.009 x P -- 0.095) (Pressure Error x Temp. Factor x 0.009 x VS) VS = 5.0 0.25 Vdc Temperature Error Band 4.0 3.0 Temperature Error Factor 2.0 1.0 0.0 MPXA6115A/MPXH6115A Series Break Points Temp -- 40 0 to 85 125 Multiplier 3 1 1.75 Freescale Semiconductor, Inc... --40 --20 0 20 40 60 80 100 120 140 Temperature in C NOTE: The Temperature Multiplier is a linear response from 0C to --40C and from 85C to 125C Pressure Error Band 3.0 2.0 Pressure Error (kPa) 1.0 0.0 --1.0 -- 2.0 -- 3.0 Pressure 15 to 115 (kPa) Error (Max) 1.5 (kPa) 20 40 60 80 100 120 Pressure (in kPa) Error Limits for Pressure ORDERING INFORMATION -- SMALL OUTLINE PACKAGE Device Type Basic Element Options Absolute, Element Only Absolute, Element Only Ported Element Absolute, Axial Port Absolute, Axial Port Case No. 482 482 482A 482A MPX Series Order No. MPXA6115A6U MPXA6115A6T1 MPXA6115AC6U MPXA6115AC6T1 Packing Options Rails Tape and Reel Rails Tape and Reel Marking MPXA6115A MPXA6115A MPXA6115A MPXA6115A ORDERING INFORMATION -- SUPER SMALL OUTLINE PACKAGE Device Type Basic Element Options Absolute, Element Only Absolute, Element Only Ported Element Absolute, Axial Port Absolute, Axial Port Case No. 1317 1317 1317A 1317A MPX Series Order No. MPXH6115A6U MPXH6115A6T1 MPXH6115AC6U MPXH6115AC6T1 Packing Options Rails Tape and Reel Rails Tape and Reel Marking MPXH6115A MPXH6115A MPXH6115A MPXH6115A MPXA6115A MPXH6115A SERIES For More Information On This Product, 4 Go to: www.freescale.com Motorola Sensor Device Data Freescale Semiconductor, Inc. SURFACE MOUNTING INFORMATION MINIMUM RECOMMENDED FOOTPRINT FOR SMALL AND SUPER SMALL PACKAGES Surface mount board layout is a critical portion of the total design. The footprint for the semiconductor package must be the correct size to ensure proper solder connection interface between the board and the package. With the correct pad geometry, the packages will self--align when subjected to a solder reflow process. It is always recommended to fabricate boards with a solder mask layer to avoid bridging and/or shorting between solder pads, especially on tight tolerances and/or tight layouts. 0.660 16.76 0.100 TYP 2.54 Freescale Semiconductor, Inc... 0.060 TYP 8X 1.52 0.300 7.62 0.100 TYP 8X 2.54 inch mm Figure 5. SOP Footprint (Case 482) 0.050 1.27 TYP 0.150 3.81 0.387 9.83 0.027 TYP 8X 0.69 0.053 TYP 8X 1.35 inch mm Figure 6. SSOP Footprint (Case 1317 and 1317A) Motorola Sensor Device Data MPXA6115A MPXH6115A SERIES For More Information On This Product, 5 Go to: www.freescale.com Freescale Semiconductor, Inc. NOTES Freescale Semiconductor, Inc... MPXA6115A MPXH6115A SERIES For More Information On This Product, 6 Go to: www.freescale.com Motorola Sensor Device Data Freescale Semiconductor, Inc. NOTES Freescale Semiconductor, Inc... Motorola Sensor Device Data MPXA6115A MPXH6115A SERIES For More Information On This Product, 7 Go to: www.freescale.com Freescale Semiconductor, Inc. SMALL OUTLINE PACKAGE DIMENSIONS --A5 4 D 8 PL 0.25 (0.010) M TB S A S --B8 G 1 NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. ALL VERTICAL SURFACES 5_ TYPICAL DRAFT. DIM A B C D G H J K M N S INCHES MIN MAX 0.415 0.425 0.415 0.425 0.212 0.230 0.038 0.042 0.100 BSC 0.002 0.010 0.009 0.011 0.061 0.071 0_ 7_ 0.405 0.415 0.709 0.725 MILLIMETERS MIN MAX 10.54 10.79 10.54 10.79 5.38 5.84 0.96 1.07 2.54 BSC 0.05 0.25 0.23 0.28 1.55 1.80 0_ 7_ 10.29 10.54 18.01 18.41 S N Freescale Semiconductor, Inc... J K M C PIN 1 IDENTIFIER H --TSEATING PLANE CASE 482-01 ISSUE O --A5 4 D 8 PL 0.25 (0.010) M TB S A S N--B8 G 1 NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. ALL VERTICAL SURFACES 5_ TYPICAL DRAFT. DIM A B C D G H J K M N S V W INCHES MIN MAX 0.415 0.425 0.415 0.425 0.500 0.520 0.038 0.042 0.100 BSC 0.002 0.010 0.009 0.011 0.061 0.071 0_ 7_ 0.444 0.448 0.709 0.725 0.245 0.255 0.115 0.125 MILLIMETERS MIN MAX 10.54 10.79 10.54 10.79 12.70 13.21 0.96 1.07 2.54 BSC 0.05 0.25 0.23 0.28 1.55 1.80 0_ 7_ 11.28 11.38 18.01 18.41 6.22 6.48 2.92 3.17 S W V C J K M PIN 1 IDENTIFIER H --TSEATING PLANE CASE 482A-01 ISSUE A MPXA6115A MPXH6115A SERIES For More Information On This Product, 8 Go to: www.freescale.com Motorola Sensor Device Data Freescale Semiconductor, Inc. SMALL OUTLINE PACKAGE DIMENSIONS (CONTINUED) --A5 4 NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. ALL VERTICAL SURFACES 5_ TYPICAL DRAFT. 6. DIMENSION S TO CENTER OF LEAD WHEN FORMED PARALLEL. DIM A B C D G J K M N S INCHES MIN MAX 0.415 0.425 0.415 0.425 0.210 0.220 0.026 0.034 0.100 BSC 0.009 0.011 0.100 0.120 0_ 15 _ 0.405 0.415 0.540 0.560 MILLIMETERS MIN MAX 10.54 10.79 10.54 10.79 5.33 5.59 0.66 0.864 2.54 BSC 0.23 0.28 2.54 3.05 0_ 15 _ 10.29 10.54 13.72 14.22 --B8 G 1 0.25 (0.010) M TB D 8 PL SA S S N PIN 1 IDENTIFIER DETAIL X Freescale Semiconductor, Inc... C --TK M J DETAIL X SEATING PLANE CASE 482B-03 ISSUE B --A5 4 N--B8 G 1 0.25 (0.010) M TB D 8 PL SA NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. ALL VERTICAL SURFACES 5_ TYPICAL DRAFT. 6. DIMENSION S TO CENTER OF LEAD WHEN FORMED PARALLEL. S DIM A B C D G J K M N S V W SEATING PLANE INCHES MIN MAX 0.415 0.425 0.415 0.425 0.500 0.520 0.026 0.034 0.100 BSC 0.009 0.011 0.100 0.120 0_ 15 _ 0.444 0.448 0.540 0.560 0.245 0.255 0.115 0.125 MILLIMETERS MIN MAX 10.54 10.79 10.54 10.79 12.70 13.21 0.66 0.864 2.54 BSC 0.23 0.28 2.54 3.05 0_ 15 _ 11.28 11.38 13.72 14.22 6.22 6.48 2.92 3.17 S DETAIL X W V C PIN 1 IDENTIFIER --TK M J DETAIL X CASE 482C-03 ISSUE B Motorola Sensor Device Data MPXA6115A MPXH6115A SERIES For More Information On This Product, 9 Go to: www.freescale.com Freescale Semiconductor, Inc. SUPER SMALL OUTLINE PACKAGE DIMENSIONS 2X 0.006 C A B 0.420 0.400 0.050 0.025 0.300 0.280 3 0.019 5 0.014 0.004 M C A B 8X NOTES: 1. ALL DIMENSIONS ARE IN INCHES. 2. DIMENSIONING AND TOLERANCING PER ASME Y14.5M--1994. 3. DIMENSIONS DO NOT INCLUDE MOLD FLASH OR PROTRUSIONS. MOLD FLASH OR PROTRUSIONS SHALL NOT EXCEED .006 INCHES PER SIDE. 4. ALL VERTICAL SURFACES TO BE 5 MAXIMUM. 5. DIMENSION DOES NOT INCLUDE DAMBAR PROTRUSION. ALLOWABLE DAMBAR PROTRUSION SHALL BE .008 INCHES MAXIMUM. Freescale Semiconductor, Inc... A B 3 0.300 0.280 0.298 0.278 .010 0.165 0.145 0.004 DETAIL E C SEATING PLANE GAGE PLANE 0.010 0.002 0.023 0.013 DETAIL E 10 0 CASE 1317-03 ISSUE B MPXA6115A MPXH6115A SERIES For More Information On This Product, 10 Go to: www.freescale.com Motorola Sensor Device Data Freescale Semiconductor, Inc. SUPER SMALL OUTLINE PACKAGE DIMENSIONS (CONTINUED) 2X 0.006 C A B 0.420 0.400 0.050 0.025 0.345 0.325 NOTES: 1. ALL DIMENSIONS ARE IN INCHES. 2. DIMENSIONING AND TOLERANCING PER ASME Y14.5M--1994. 3. DIMENSIONS DO NOT INCLUDE MOLD FLASH OR PROTRUSIONS. MOLD FLASH OR PROTRUSIONS SHALL NOT EXCEED .006 INCHES PER SIDE. 4. ALL VERTICAL SURFACES TO BE 5 MAXIMUM. 5. DIMENSION DOES NOT INCLUDE DAMBAR PROTRUSION. ALLOWABLE DAMBAR PROTRUSION SHALL BE .008 INCHES MAXIMUM. 8X Freescale Semiconductor, Inc... 0.018 0.014 M 5 CAB GAGE PLANE A B 0.345 0.325 0.004 .014 0.010 0.002 0.048 0.038 DETAIL E 10 0 0.130 0.110 0.200 0.180 0.390 0.370 3 0.300 0.280 0.004 DETAIL E C SEATING PLANE A B 3 0.300 0.280 BOTTOM VIEW CASE 1317A-01 ISSUE A Motorola Sensor Device Data MPXA6115A MPXH6115A SERIES For More Information On This Product, 11 Go to: www.freescale.com Freescale Semiconductor, Inc. Freescale Semiconductor, Inc... Information in this document is provided solely to enable system and software implementers to use Motorola products. There are no express or implied copyright licenses granted hereunder to design or fabricate any integrated circuits or integrated circuits based on the information in this document. Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters that may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals", must be validated for each customer application by customer's technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. MOTOROLA and the Stylized M Logo are registered in the US Patent and Trademark Office. All other product or service names are the property of their respective owners. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer. E Motorola Inc. 2003 HOW TO REACH US: USA/EUROPE/LOCATIONS NOT LISTED: Motorola Literature Distribution P.O. Box 5405, Denver, Colorado 80217 1--800--521--6274 or 480--768--2130 JAPAN: Motorola Japan Ltd.; SPS, Technical Information Center, 3--20--1, Minami--Azabu, Minato--ku, Tokyo 106--8573, Japan 81--3--3440--3569 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Centre, 2 Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong 852--26668334 HOME PAGE: http://motorola.com/semiconductors MPXA6115A MPXH6115A SERIES For More Information On This Product, 12 Go to: www.freescale.com Motorola Sensor Device Data MPXA6115A |
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